Packaging Design for Lawrence Berkeley National Laboratory High Resistivity CCDs

The Lawrence Berkeley National Laboratory has been developing fully-depleted high resistivity CCDs. These CCDs exhibit very high red quantum efficiency, no red fringing, and very low lateral charge diffusion, making them good candidates for astronomical applications that require better red response or better point spread function than can typically be achieved with standard thinned CCDs. For the LBNL 2Kx4K CCD we have developed a four-side mosaic package fabricated from aluminum nitride. Our objectives have been to achieve a flatness of less than 10 micrometers peak-to-valley and a consistent final package thickness variation of 10 micrometers or less in a light-weight package. We have achieved the flatness objective, and we are working toward the thickness variation objective.